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1

Silicon anisotropic etching in KOH-isopropanol etchant

Irena Barycka, Irena Zubel

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 1.29 MB

1995

2

Silicon anisotropic etching in alkaline solutions IV: The effect of organic and inorganic agents on silicon anisotropic etching process

Irena Zubel, Irena Barycka, Kamilla Kotowska, Małgorzata Kramkowska

Journal:

Sensors and Actuators A: Physical

Year:

2001

Language:

english

File:

PDF, 313 KB

english, 2001

3

Silicon anisotropic etching in alkaline solutions I. The geometric description of figures developed under etching Si(100) in various solutions

Irena Zubel, Irena Barycka

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 732 KB

english, 1998

4

Chemical etching of (100) GaAs in the (NH4)2Cr2O7-H2SO4-N H4Cl-H2O system

Irena Barycka, Irena Zubel

Journal:

Journal of Materials Science

Year:

1986

Language:

english

File:

PDF, 489 KB

english, 1986

5

Chemical etching of (100) GaAs in a sulphuric acid-hydrogen peroxide-water system

Irena Barycka, Irena Zubel

Journal:

Journal of Materials Science

Year:

1987

Language:

english

File:

PDF, 639 KB

english, 1987

6

Sodium Hydroxide Solution Shows Selective Etching of Boron-Doped Silicon

Journal:

Journal of The Electrochemical Society

Year:

1979

Language:

english

File:

PDF, 230 KB

english, 1979

7

Use of an Electron Beam to Separate Semiconductor Devices with Beam Leads

Journal:

Journal of The Electrochemical Society

Year:

1981

Language:

english

File:

PDF, 1.45 MB

english, 1981

8

SPIE Proceedings [SPIE Optoelectronic and Electronic Sensors IV - Gliwice, Poland (Tuesday 13 June 2000)] Optoelectronic and Electronic Sensors IV - Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions

Barycka, Irena, Dziuban, Jan, Kramkowska, Malgorzata, Zubel, Irena, Fraczek, Jerzy

Year:

2001

Language:

english

File:

PDF, 652 KB

english, 2001